madan-prl-78-1743

Data for reference madan-prl-78-1743

Stabilization of Cubic AlN in Epitaxial AlN/TiN Superlattices

A Madan, IW Kim, SC Cheng, P Yashar, VP Dravid, SA Barnett

Physical Review Letters 78(9), 1743 (1997).

The high-pressure rocksalt structure of AlN was stabilized in epitaxial AlN/TiN(001) superlattices with AlN layer thickness (less-than-or-equal)2.0 nm. The AlN layers were shown to be pure rocksalt-structure AlN, with a stress-free lattice parameter of 0.408(plus-minus)0.002 nm, using x-ray diffraction, transmission electron microscopy, and electron energy loss spectroscopy. The stable hexagonal phase was observed for AlN layer thickness (greater-than)2 nm. The rocksalt structure formed at small layer thicknesses since it provided lower AlN/TiN interfacial energy than the hexagonal or zinc-blende structures.

Contributed by A.E. Nikolaev from www-proxy.ioffe.rssi.ru. on Wednesday, March 26, 1997 4:27:10 AM

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