Data for reference pearton-mseb-31-309Dry Etching and Implantation Characteristics of Iii-n Alloys
SJ Pearton, CB Vartuli, RJ Shul, JC Zolper, et al.
Materials Science and Engineering B-Solid State Materials for Advanced Technology 31(3), 309 (1995).
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Contributed by E. Hellman
Modified by John C. Zolper from sahp315.sandia.gov. on Friday, May 3, 1996 2:56:13 PM
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