Data for reference medelci-mrssp-572-535

Photo assisted RIE of GaN in BCl3/Cl2/N2

N Medelci, A Tempez, I Berishev, D Starikov, A Bensaoula

Materials Research Society Symposium Proceedings 572, 535 (1999).

This item is cited by the following items in the database:

  1. Effect of Photo-Assisted RIE Damage on GaN

Contributed by A submitted manuscript, on Monday, July 14, 2003 3:30:44 PM

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