Materials Research Society Symposium Proceedings 468, 431 (1997).
Metallurgical reactions between Ni and GaN have been explored at temperatures between 400 and 900 °ree;C in N2, Ar, and forming gas. A trend of increasing Ga content in the reacted films was observed with increasing temperature. The reactions are consistent with the thermodynamics of the Ni‐Ga‐N system. Changes in the film morphology on annealing were also examined. Metal island formation and a corresponding deep, non-uniform metal penetration into GaN were observed at high temperatures. The relevance of the observed nature of phase formation and morphology in these thin films to electrical properties of Ni/GaN and Au/Ni/GaN contacts is also considered.
This paper is part of Gallium Nitride and Related Materials II
Full Text of this article is available on this server.
This item cites the following items in the database:
Contributed by Materials Research Society
last updated Wednesday, May 4, 2005 12:23:10 PM.
© 1998 The Materials Research Society