Data for reference humphreys-mrssp-162-531

Microstructural and optical characterization of GaN films grown by PECVD on (0001) sapphire substrates

T. P. Humphreys, C. A. Sukow, R. J. Nemanich, J. B. Posthill, R. A. Rudder, S. V. Hattangady, R. J. Markunas

Materials Research Society Symposium Proceedings 162, 531 (1990).

This item is cited by the following items in the database:

  1. GaN, AlN, and InN: A review
  2. GaN films prepared by ECR plasma-assisted deposition

Contributed by S. Strite

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