Data for reference hong-jvsta-15-797

Rapid thermal processing of III-nitrides

J Hong, JW Lee, CB Vartuli, CR Abernathy, JD MacKenzie, SM Donovan, SJ Pearton, JC Zolper

Journal of Vacuum Science and Technology A-Vacuum Surfaces and Films 15(3), 797 (1997).

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This item is cited by the following items in the database:

  1. Effect Of Implantation Temperature On Damage Accumulation In Ar - Implanted GaN

Contributed by A.E. Nikolaev from www-proxy.ioffe.rssi.ru. on Sunday, July 20, 1997 11:42:58 AM

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