Data for reference vartuli-jvsta-15-638Plasma etching of III-nitrides in ICl/Ar and IBr/Ar plasmas
CB Vartuli, SJ Pearton, JW Lee, JD MacKenzie, CR Abernathy, RJ Shul
Journal of Vacuum Science and Technology A-Vacuum Surfaces and Films 15(3), 638 (1997).
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