Data for reference mileham-jvsta-14-836

Patterning of AlN, InN, and GaN in KOH-based solutions

J. R. Mileham, S. J. Pearton, C. R. Abernathy, J. D. MacKenzie , R. J. Shul, S. P. Kilcoyne

Journal of Vacuum Science and Technology A-Vacuum Surfaces and Films 14(3), 836 (1996).

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