Data for reference pearton-jvsta-14-831

Unintentional hydrogenation of GaN and related alloys during processing Unintentional hydrogenation during processing

S. J. Pearton, C. R. Abernathy, C. B. Vartuli, J. W. Lee, J. D. MacKenzie , R. G. Wilson , R. J. Shul , F. Ren , J. M. Zavada

Journal of Vacuum Science and Technology A-Vacuum Surfaces and Films 14(3), 831 (1996).

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