Data for reference mclane-jvsta-14-1046

Magnetron reactive ion etching of group III-nitride ternary alloys

G. F. McLane, T. Monahan, D. W. Eckart , S. J. Pearton, C. R. Abernathy

Journal of Vacuum Science and Technology A-Vacuum Surfaces and Films 14(3), 1046 (1996).

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Contributed by Andrei Nikolaev from shuttle.ioffe.rssi.ru
Modified by M. Osinski from sakai24.svbl.tokushima-u.ac.jp. on November 20, 1997 9:44:44 PM

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