Data for reference ren-jvsta-13-753Nanoscale structures in III-V semiconductors using sidewall masking and high ion density dry etching
Nanoscale structures in III-V semiconductors
F. Ren , S. J. Pearton, C. R. Abernathy , J. R. Lothian
Journal of Vacuum Science and Technology A-Vacuum Surfaces and Films 13(3), 753 (1995).
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