Japanese Journal of Applied Physics 35(7B), L873 (1996).
Hexagonal GaN (h-GaN) films are grown on GaAs (100) vicinal substrates by hydride vapor phase epitaxy. The substrate misorientation dependence of the crystal structure is investigated by X-ray diffraction measurements using a 4-circle diffractometer. It is found that misorientation toward the 111 B direction is essential for the growth of single domain h-GaN films and that the c-axis of the single domain h-GaN orients to the GaAs 111 B direction.
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