Data for reference ren-jem-26-1287

Effect of Dry Etching on Surface Properties of III-Nitrides

F Ren, JR Lothian, SJ Pearton, CR Abernathy, CB Vartuli, JD MacKenzie, RG Wilson, RF Karlicek

Journal of Electronic Materials 26(11), 1287 (1997).

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Contributed by A.E. Nikolaev from www-proxy.ioffe.rssi.ru. on November 23, 1997 5:04:18 AM

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