Data for reference mackenzie-jem-26-1266Plasma Characteristics and the Growth of Group III-Nitrides by Metalorganic Molecular Beam Epitaxy
JD MacKenzie, L Abbaschian, CR Abernathy, SM Donovan, SJ Pearton, PC Chow, J Van Hove
Journal of Electronic Materials 26(11), 1266 (1997).
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