Data for reference lee-jem-25-835

Reactive Ion Etching of Gallium Nitride Films

H Lee, DB Oberman, JS Harris

Journal of Electronic Materials 25(5), 835 (1996).

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Contributed by A.E. Nikolaev from www-proxy.ioffe.rssi.ru. on Friday, December 13, 1996 12:28:27 PM

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