Data for reference ping-jem-25-825

Dry Etching of GaN Using Chemically Assisted Ion Beam Etching with HCl and H2/Cl2

AT Ping, AC Schmitz, MA Khan, I Adesida

Journal of Electronic Materials 25(5), 825 (1996).

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Contributed by A.E. Nikolaev from www-proxy.ioffe.rssi.ru. on Friday, December 13, 1996 12:26:05 PM

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