Journal of the Electrochemical Society 144(3), 1127 (1997).
A kinetic study is performed of the decomposition of Trimethylamine, CH33N (TMN) by in-situ mass spectrometry. The decomposition process starts at 525 C and was determined to be a multistep process. The primary products are dimethylamino and methyl radicals. The growth of GaN from TMN and TMG can result in the introduction of carbon impurities, due to polymerization in the gas phase. Hence, low (below 525 C) temperatures should be (and are) used to suppress gas-phase decomposition.
Contributed by Wilfried G.J.H.M. van Sark from 131.174.8.4 on Wednesday, May 7, 1997 6:10:33 AM
last updated Wednesday, May 4, 2005 11:58:48 AM.
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