Data for reference kung-jap-75-4515Crystallography of epitaxial growth of wurtzite-type thin films on sapphire substrates
P. Kung, C. J. Sun, A. Saxler, H. Ohsato, M. Razeghi
Journal of Applied Physics 75(9), 4515 (1994).
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- Plasma Cleaning and Nitridation of Sapphire Substrates for AlxGa1-xN Epitaxy as Studied by ARXPS and XPD
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