Data for reference kistenmacher-jap-74-1684

Structural and Electrical Properties of Reactively Sputtered Inn Thin Films on AlN-Buffered (00.1) Sapphire Substrates: Dependence on Buffer and Film Growth Temperatures and Thicknesses

TJ Kistenmacher, SA Ecelberger, WA Bryden

Journal of Applied Physics 74(3), 1684 (1993).

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Contributed by E. Hellman

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