Data for reference ishii-iopconf-142-899

Mass-spectrometric study of gas reaction of trimethylgallium-monomethylhydrazine in a low-pressure metaloorganic chemical vapor deposition apparatus by in situ gas sampling

M Ishii, T Minami, T Miyata, S Karaki, S Tanaka

Institute of Physics Conference Series 142, 899 (1996).

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Contributed by A.E. Nikolaev from www-proxy.ioffe.rssi.ru. on Sunday, July 20, 1997 8:35:15 AM

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