meyyappan-ieeetps-23-623

Data for reference meyyappan-ieeetps-23-623

Modeling of electron cyclotron resonance discharges

M. Meyyappan, T. R. Govindan

IEEE Transactions on Plasma Science 23(4), 623 (1995).

This paper provides the details of a zero-dimensional model to analyze an ECR plasma source. Results for an argon discharge in terms of electron density and energy have been discussed.

This item is cited by the following items in the database:

Characteristics of an Electron Cyclotron Resonance Plasma Source for the Production of Active Nitrogen Species in III-V Nitride Epitaxy

Contributed by A submitted manuscript, on December 11, 1997 11:18:14 AM

If you are a registered user, and would like to help the journal improve its references database, you can help by adding data to the database. The author list may be incomplete; the abstract or title may be missing, and the list of references cited by the article is probably absent or incomplete.