Data for reference shul-electronlett-32-1408

ICP Etching of GaN,

R. J. Shul, G. B. McClellan, S. J. Pearton, C. R. Abernathy, C. Constantine, C. Barratt

Electronics Letters 32, 1408 (1996).

This item is cited by the following items in the database:

  1. A Review of Dry Etching of GaN and Related Materials

Contributed by A submitted manuscript, on Sunday, November 12, 2000 4:26:39 PM

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