Data for reference strite-bookarticle-1995-1

Thin Film Deposition and Dopant Incorporation by Energetic Particle Sources

S. Strite, H. Morkoç

published by (4), 1 (1995).

Review of the design and use of energetic particle sources for vacuum deposition and semiconductor doping.

This item is cited by the following items in the database:

  1. Properties of InGaN deposited on Glass at Low Temperature

Contributed by S. Strite from internet-gateway-x.zurich.ibm.com. on Friday, April 4, 1997 1:44:53 PM

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