Data for reference gillis-apl-68-2255

Low Energy Electron Enhanced Etching of Semiconductors,

H. P. Gillis, D. A. Choutov, K. P. Martin, L. Song

Applied Physics Letters 68, 2255 (1996).

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This item is cited by the following items in the database:

  1. A Review of Dry Etching of GaN and Related Materials

Contributed by A submitted manuscript, on Sunday, November 12, 2000 4:26:49 PM

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