Data for reference minsky-apl-68-1531

Room-temperature photoenhanced wet etching of GaN

M. S. Minsky, M. White, E. L. Hu

Applied Physics Letters 68(11), 1531 (1996).

The Materials Research Society does not yet have permission from the copyright owner to make the abstract available.

This item is cited by the following items in the database:

  1. Etching processes for fabrication of GaN/InGaN/AlN microdisk laser structures
  2. Dislocation Density of GaN Grown by Hydride Vapor Phase Epitaxy
  3. Selective Etching of GaN from AlGaN/GaN and AlN/GaN Structures

Contributed by Andrei Nikolaev from shuttle.ioffe.rssi.ru


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