Figure 2

The effect of temperature on AlN growth observed in three samples: a) SEM image of the hexagonal features grown at TG=1820-1830°C, EDX of these features (AlNxSiCy ); b) AlN single crystal growth at TG=1870-1880°C; cracks due to thermal and mechanical stresses are evident; c) colorless and transparent AlN islands with flat c-faces grown at TG=1920-1930°C.


top        text     Figure 1     Figure 3        tables        endnotes

last updated Monday, March 1, 2004 4:14:13 PM.

© 2004 The Materials Research Society MRS Internet Journal of Nitride Semiconductor Research