The effect of temperature on AlN growth observed in three samples: a) SEM image of the hexagonal features grown at TG=1820-1830°C, EDX of these features (AlNxSiCy ); b) AlN single crystal growth at TG=1870-1880°C; cracks due to thermal and mechanical stresses are evident; c) colorless and transparent AlN islands with flat c-faces grown at TG=1920-1930°C.