Summary of the key points for controlling the polarity of GaN films on sapphire substrates (as detailed in the Articles and the Recipes) in the time chart of the two-step MOCVD process. Our typical growth conditions are represented. The polarity at the end of each process is remarked with blue and red indicating +c and -c polarity, respectively, which can be used as the road map to control the polarity of GaN in MOCVD. [after Ref. 128]
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