High-Speed Visible-Blind Resonant Cavity Enhanced AlGaN Schottky Photodiodes


Necmi Biyikli, Tolga Kartaloglu, Orhan Aytur
Bilkent University Dept. of Electrical and Electronics Engineering

Ibrahim Kimukin, Ekmel Ozbay
Bilkent University Dept. of Physics

This article was received on Friday, September 19, 2003 and accepted on Thursday, October 30, 2003.

Abstract

We have designed, fabricated and tested resonant cavity enhanced visible-blind AlGaN-based Schottky photodiodes. The bottom mirror of the resonant cavity was formed with a 20 pair AlN/Al0.2Ga0.8N Bragg mirror. The devices were fabricated using a microwave compatible fabrication process. Au and indium-tin-oxide (ITO) thin films were used for Schottky contact formation. ITO and Au-Schottky devices exhibited resonant peaks with 0.153 A/W and 0.046 A/W responsivity values at 337 nm and 350 nm respectively. Temporal high-speed measurements at 357 nm resulted in fast pulse responses with pulse widths as short as 77 ps. The fastest UV detector had a 3-dB bandwidth of 780 MHz.

Outline

  • Introduction
  • Experimental
  • Epitaxial Design
  • Device Fabrication
  • Device Testing
  • Results and Discussion
  • Conclusions
  • Acknowledgments
  • Linked Pages

    Cite this article as: MRS Internet J. Nitride Semicond. Res. 8, 8(2003).

    last updated Wednesday, November 5, 2003 11:28:24 AM.

    © 2003 The Materials Research Society MRS Internet Journal of Nitride Semiconductor Research