Figure 1a

SEM and AFM images of as-grown and LT-buffer GaN for an annealing temperature of initial buffer at 550° (RMS: 2.4 nm).

Figure 1b

SEM and AFM images of as-grown and LT-buffer GaN for an annealing temperature of 950° (RMS: 7.1 nm).

Figure 1c

SEM and AFM images of as-grown and LT-buffer GaN for an annealing temperature of 1020° (RMS: 22 nm).

Figure 1d

SEM and AFM images of as-grown and LT-buffer GaN for an annealing temperature of 1050° (RMS: 24 nm)

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