[1] N. Papanicolau, M. V. Rao, B. Molnar, J. Tucker, A. Edwards, O. W. Holland, M. C. Ridgway, Nucl. Instrum. Methods B 148, 416 (1999). [text citation]
[2] S. J. Pearton, J. C. Zolper, R. J. Shul, F. Ren, J. Appl. Phys. 86, 1 (1998). [text citation]
[3] S. O. Kucheyev, J. S. Williams, J. Zou, C. Jagadish, G. Li, Nucl. Instrum. Methods B 178, 209 (2001). [text citation]
[4] C. Liu, A. Wenzel, K. Volz, B. Rauschenbach, Nucl. Instrum. Methods B 148, 369 (1999). [text citation]
[5] N. Parikh, A. Suvkhanov, M. Lioubtchenko, E. Carlson, M. Bremser, D. Bray, R. Davis, J. Hunn, Nucl. Instrum. Methods B 127/128, 463 (1997). [text citation]
[6] A. Wenzel, C. Liu, B. Rauschenbach, Mater. Sci. Eng. B 59, 191 (1999). [text citation]
[7] L. Eriksson, J. A. Davies, N. G. E. Johansson, J. W. Mayer, J. Appl. Phys. 40, 842 (1969). [text citation]
[8] S. T. Picraux, J. E. Westmoreland, J. W. Mayer, R. R. Hart, O. J. Marsh, Appl. Phys. Lett. 14, 7 (1969). [text citation]
[9] T. E. Hynes, O. W. Holland, Appl. Phys. Lett. 59, 452 (1991). [text citation]
[10]L. C. Feldman, J. M. Mayer, S. T. Picraux, "Materials Analysis by Ion Channeling", Academic Press, 117-135 (1982) [text citation]
[11] J Hong, JW Lee, CB Vartuli, CR Abernathy, JD MacKenzie, SM Donovan, SJ Pearton, JC Zolper, J. Vac. Sci. Technol. A 15, 797-801 (1997). [text citation]
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