Figure 1a

AFM (5x5µm²) scan showing the layer morphology for 180 sec SiN treatment time. The GaN islands density is about 1x10⁹ cm^-2.

Figure 1b

AFM (5x5µm²) scan showing the layer morphology for 300 sec SiN treatment time. The GaN islands density is about 5x10⁸ cm^-2.

Figure 1c

AFM (5x5µm²) scan showing the layer morphology for 480 sec SiN treatment time. The GaN islands density is about 3x10⁸ cm^-2.

Figure 1d

AFM (5x5µm²) scan showing the layer morphology for 720 sec SiN treatment time. The GaN islands density is about 1x10⁸ cm^-2.

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