Tables

Table 1

Hardness of III-V nitrides at room temperature together with phase transition pressure, bonding distance, and shear modulus. InN and In0.1Ga0.9N grown on sapphire substrate.

Crystal

Micro-hardness (GPa)

Nano-hardness (GPa)

Phase transition pressure (GPa)

Bonding distance (nm)

Shear modulus (GPa)

AlN

17.7

18

22.9 [19]

0.192

154 [8]

GaN

10.2

18-20 [14]

52 [20]

0.196

121 [29]

InN on sapphire


11.2 [15]

15 [20]

0.214

43 [30]

In0.1Ga0.9N on sapphire


52 [16]




Si

12.0

14 [17]

11.3 [18]

0.235

60.5


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© 2002 The Materials Research Society MRS Internet Journal of Nitride Semiconductor Research