Figures

Figure 1

FSEM image of the cleaved edge of the epitaxial film.

Figure 2

AFM image of the surface of a 6H-SiC substrate. The image reveals scratches on the surface, resulting from mechanical polishing.

Figure 3

AFM image of the surface of an AlGaN epitaxial layer. The arrows indicate structures assumed to originate from scratches on the surface of the substrate.

Figure 4

Spatially averaged spectrum of an AlGaN epitaxial film.

Figure 5

Monochromatic, top view CL images recorded at 30 K, using a 5 kV acceleration voltage. The images were recorded with the detection at (a) 3.70 eV, (b) 3.72 eV and (c) 3.74 eV, where (b) corresponds to the peak energy position of the excitonic emission from the film.

Figure 6

Spatially averaged cathodoluminescence spectra of an AlGaN epitaxial film. The excitation density dependence is recorded by varying the electron beam current from 1 nA to 50 nA. The spectra are normalised.

Figure 7

A series of cathodoluminescence spectra recorded in spot mode along a line on an AlGaN film.

Figure 8

Monochromatic CL images from the cleaved edge of an AlGaN epitaxial film. Recorded at (a) 3.69 eV and at (b) 3.75 eV. The sample was mounted with an approximate tilt of 45 degrees. The dark left part of the image is the SiC and the brighter region in the center of the image correspond to the side of the epitaxial film. The right part corresponds to the top of the epitaxial film.

Figure 9

Monochromatic CL images from the cleaved edge of an AlGaN epitaxial film, with the same mounting as the sample in figure 8

Figure 10

Schematic diagram of the model for the epitaxial AlGaN film.

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© 2002 The Materials Research Society