Tables

Table 1

 X-ray rocking curve FWHM values for GaN films of specified miscut, growth temperature, Ga/N ratio, and thickness. Two values for the FWHM of films on miscut substrates refer to different sample orientations as discussed in the text.

Miscut

T (°C)

Ga/N ratio

thickness (µm)

FWHM X-ray rocking curves (arcsec)





(0 0 0 2)

(1 0 (-1) 2)

On-axis

730

1.1

1.0

121

500

On-axis

780

1.1

2.0

119

410

On-axis

750

1.4

1.3

128

927

On-axis

750

1.7

1.0

57

960

On-axis

730

1.9

1.0

218

960

3.5° towards <1 1 -2 0>

750

1.5

1.0

68

520

3.5° towards <1 1 -2 0>

750

1.5

1.0

135

442/575

3.5° towards <1 1 -2 0>

750

1.5

1.2

115

490/634

3.5° towards <1 -1 0 0>

750

1.5

1.0

93

612/418 

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