0 0], H-etched; (d) off-axis, 3.5° towards [1 1 
0], H-etched. Gray scale ranges are (a) 10 nm, (b) 0.7 nm, (c) 7 nm, and (d) 1 nm. Note the varying lateral scales. AFM images of 6H-SiC(0001) surfaces: (a) on-axis, as-received; (b) on-axis, H-etched; (c) off-axis, 3.5° towards [1 [1 0 0], H-etched; (d) off-axis, 3.5° towards [1 1 0], H-etched. Gray scale ranges are (a) 10 nm, (b) 0.7 nm, (c) 7 nm, and (d) 1 nm. Note the varying lateral scales.
© 2002 The Materials Research Society
