Figure 7

Optical micrograph of AlN crystal surface grown at 1780°C and 400 torr on (0001) 6H-SiC substrate for 10 hours with an AlN epitaxial layer. The magnification is 100x: (a) on-axis, (b) 8o off-axis. (The real width of crystal in above image is about 1.0 mm).


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