Composition measurement |
Poisson's ratio |
In content |
Energy measurement |
Bowing parameter (eV) | ||
measured |
recalculated | |||||
Present work |
XRD |
0.17 |
0 - 0.2 |
PL |
2.5 |
2.5 |
Takeuchi et al. [2] |
XRD |
0.23+0.10·x |
0 - 0.2 |
PL |
3.2 |
2.6 |
Nakamura [3] |
XRD |
0 |
0 - 0.33 |
PL |
1.0 |
2.1 |
RBS & XRD |
(0.18) |
0 - 0.11 |
OT |
2.5 |
- | |
Wetzel et al. [6] |
XRD |
0.23+0.05·x |
0 - 0.2 |
PR |
2.6 |
2.1 |
PL |
3.2 |
2.6 | ||||
Scholz et al. [7] |
XRD |
0 |
0 - 0.13 |
PDS |
1.1 |
2.2 |
Wagner et al. [8] |
SIMS |
- |
0 - 0.15 |
PR |
2.0 |
- |