Tables

Table 1

 Results of x-ray rocking curve of symmetric [0 0 0 2] asymmetric [1 1 (-2) 2] peaks and lattice parameters of SiC substrate, (AlN)0.8(SiC)0.2 alloy and pure AlN crystal.
Sample [0 0 0 2] [1 1 (-2) 2] a (Å) c (Å)

2theta (deg) FWHM (arcsec) 2theta (deg) FWHM (arcsec)

SiC substrate 53.75 489 120.93 562 3.080 5.065
(AlN)0.8(SiC)0.2 alloy 54.32 1141 120.32 1454 3.104 5.016
Pure AlN 54.56 238 120.12 461 3.113 4.996 
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