| Schematic of AlGaN p-i-n photodiode structure. |
| Cathodoluminescence spectra for n-type AlGaN:Si layers grown under different conditions. |
| Cathodoluminesce spectra for three AlGaN:Mg layers having different dopant levels. |
| Optical transmittance through (a) AlGaN n-type base layer, (b) entire solar-blind heterostructure photodiode. |
| Spectral responsivity spectrum for solar-blind AlGaN heterostructure photodiode. Responsivity peak occurs at 273 nm with a FWHM = 21 nm. |
| Electrical characteristics of solar-blind AlGaN heterostructure photodiode. |
| Detectivity versus wavelength for selected photodetectors. |