Figures

Figure 1

Atomic fraction of Mg in GaN as a function of the Mg flux ratio in the gas phase, using Solution Cp₂Mg or (MeCp)₂Mg as as dopant sources. The slope gives the dopant incorporation efficiency.

Figure 2

Dependence of the Mg flux ratio on the growth rate G. G was measured by reflectometry.

Figure 3

Growth rate as a function of Mg concentration, measured by SIMS. We find a unique linear relationship, regardless of the Mg precursor used.

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