Tables for MIJ-NSR Volume 5, Article 7

Tables

Table 1

A list of X-ray rocking curves data in the samples.

Sample	Substrate	MBE	Thickness (µm)	X-ray[0 0 2] arc second	X-ray[1 0 4] arc second	X-ray[0 0 6] arc second
Sapphire substrate	Annealed sapphire				28	42
GaN SVT319	Un-annealed sapphire	RF	0.45	408	600
GaN SVT389	Annealed sapphire	RF	0.98	69	252
GaN R6385	Annealed sapphire	NH3	0.54	60	132

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