MIJ-NSR Vol. 5, Art. 4, Michael E. Bartram

Improvements in Bis(cyclopentadienyl)magnesium Purity as Determined with Gas Chromatography-Mass Spectroscopy

Michael E. Bartram
Sandia National Laboratories/New Mexico

This article was received on Tuesday, February 22, 2000 and accepted on Wednesday, April 26, 2000.

Abstract

Bis(cyclopentadienyl)magnesium (MgCp2) is used commonly as a source for doping nitride materials with magnesium. Increased oxygen incorporation known to accompany the use of MgCp2 makes the purity of this precursor an important consideration in nitride CVD. Gas chromatography-mass spectroscopy (GCMS) methods have now been developed for the identification of volatile impurities in MgCp2. Diethylether, an oxygen containing organic compound (CH₃CH₂OCH₂CH₃), and additional organic impurities were found in the MgCp2 supplied by three manufacturers. Subsequent refinements in the synthetic processes by these companies have resulted in the availability of MgCp2 free of ether and other organic impurities as determined by GCMS.

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Cite this article as: MRS Internet J. Nitride Semicond. Res. 5, 4(2000).

last updated Wednesday, May 3, 2000 7:02:15 PM.