GaN: From Selective Area Epitaxy To Epitaxial Lateral Overgrowth


X. Li, S.G. Bishop, J.J. Coleman
University of Illinois, Urbana

This article was presented as part of Symposium G, "Gallium Nitride and Related Alloys" at the 1998 Fall Meeting of the Materials Research Society held in Boston, Massachusetts, November 30-December 4.

Abstract

The evolution of the topography of GaN stripes as a function of stripe width (2 - 120 µm), fill factor and substrate smoothness has been explored. The spatially resolved optical properties of these structures have been characterized by cathodoluminescence imaging and line scans. Implications from the optical study have been discussed.

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Cite this article as: MRS Internet J. Nitride Semicond. Res. 4S1, G4.8 (1999).


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MRS Internet Journal of Nitride Semiconductor Research
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