GaN growth rate versus V/III ratio at substrate temperature 830°C. The different symbols shows data for different samples at similar conditions. I- the Ga-rich / N-rich transition; II- the molecular flow regime limitation
Reflectivity oscillation during GaN growth at different substrate temperatures
GaN growth rate versus substrate temperature. V/III ratio: blue sircles -40; black squares - 95; red triangles - 165
GaAs (001) growth rate versus substrate temperature. V/III ratio: blue circles - 2, red squares - 4.
Reflectivity oscillations during GaN free evaporation in vacuum
GaN free evaporation rate and desorption rate during the MBE growth. Green squares - free evaporation; solid line represents data of Munir and Searcy [14]; desorption rate under V/III ratio: blue sircles -40; black squares - 95; red triangles - 165.
GaN evaporation rate versus ammonia flux at substrate temperature (875±5)°C. Our experimental points are marked by the same symbols as on Figure 6, dotted line is guided for eye. Open circles and solid line represent experimental and calculated data [6], respectively.