Indium content in InGaN layer as a function of substrate temperature. Violet(dashed) line corresponds to TMIn/(TMIn+TEGa) ratio = 0.3, red line corresponds to TMIn/(TMIn+TEGa) ratio = 0.2, green (dashed-dotted ) line corresponds to TMIn/(TMIn+TEGa) ratio = 0.1. Points are the experimental data from [22] (TMIn/(TMIn+TEGa) ratio = 0.2).