Cross section SEM micrograph of a typical GaN LEO stripe on Si(111) after 60 minutes of growth: sample A, 60 nm-thick AlN.
Cross section SEM micrograph of a typical GaN LEO stripe on Si(111) after 60 minutes of growth: sample B, 180 nm-thick AlN.
Surface topography measured by tapping mode AFM: sample A, large-area scan.
Surface topography measured by tapping mode AFM: sample A, height mode. The "S" arrow indicates an instance of step termination associated with a screw-character threading dislocation intersection the surface of the film. The "E" arrow indicates an instance of a smaller surface depression typically associated with pure edge threading dislocation.
Surface topography measured by tapping mode AFM: sample B, height mode. "S" and "E" arrows as in Figure 2b.
Cross section bright-field TEM micrographs of sample A. The left and right panels correspond to g = 110 and g = 0002, respectively. The irregular top and side surfaces are due to the ion milling process.
Cross section bright-field TEM micrographs of sample B. The left and right panels correspond to g = 110 and g = 0002, respectively. The irregular top and side surfaces are due to the ion milling process.
X-ray rocking curves of sample A. The dotted (solid) line corresponds to an
-scan with the stripe direction parallel (perpendicular) to the diffraction plane.
X-ray rocking curves of sample B. The dotted (solid) line corresponds to an
-scan with the stripe direction parallel (perpendicular) to the diffraction plane.
Room temperature PL spectra of samples A and B. In this experiment the emission from both the LEO and the seed region was collected.
(a) Plan-view SEM micrograph of sample A; (b) monochromatic (
=367 nm) CL images of the same region; (c) high magnification image of (b).