XRD (-2) scan of AlN film, grown on Nb sublayer and (0001) Al2O3 substrate.
Figure 2
Representative X-ray pole figures from: a) (0001) AlN film (pluses) - peaks {101}; b) (111) Nb film (filled circles) peaks {200} c) (0001) Al2O3 substrate (triangles) - peaks {012}
last updated Thursday, November 18, 1999 2:40:30 AM.