XRD (
-2
) scan of AlN film, grown on Nb sublayer and (0001) Al2O3 substrate.
Representative X-ray pole figures from: a) (0001) AlN film (pluses) - peaks {101}; b) (111) Nb film (filled circles) peaks {200} c) (0001) Al2O3 substrate (triangles) - peaks {0
12}