SEM photograph of GaN localized islands grown on the patterned SixNy mask with [Mg]/[Ga] mole ratios of 0 (undoped GaN pyramids). Except for the Mg introduction, the growth conditions (temperature 1080°C, TMGa 16 µMole) and time (30') were identical for both samples.
SEM photograph of GaN localized islands grown on the patterned SixNy mask with [Mg]/[Ga] mole ratios of 0.08.
SEM photograph of GaN localized islands grown on the patterned SixNy mask with [Mg]/[Ga] mole ratios of 0.11.
SEM photograph of GaN localized islands grown on the patterned SixNy mask with [Mg]/[Ga] mole ratios of 0.14. The VR/VC is about 4.