Tables

Table I

Some characteristics of YSZ and AIIIBV crystals.

Crystal

Lattice

Tm,°C (melting point)

Therm. Exp. Coeff. 10-6 deg-1

Eg, eV

Type a, Å

YSZ
(ZrO2)100-x · (Y2O3)x

Cubic (fluorite)

5,141(x=10)
5,157(x=15)
5,198(x=21)

2800

11,4 (15-1000°C)


GaAs

Cub(sf)

5,65

1283

5,4

1,43

GaP

Cub(sf)

5, 445

1467

4,7

2,26

GaN

H(v)

a=3,186
c=5,178

1700

5,6
7,8

3,4


Table II

Impurity concentration in YSZ single crystals, YSZ-wafers and GaAs/YSZ films

Element

YSZ crystal, wt%

YSZ wafer, wt%

GaAs/YSZ, at. cm-3

Al

0.0004

0.001

5x1017

Ca

0.001

0.003

5x1017

Mg

0.0005

0.0005


Na

0.0001

0.003

2x1017

K

0.0005

0.001

5x1016

Si

0.001

0,015

1x1017

Cu

0.0005

0.0005


Fe

0.0004

0.0004

5x1016

Mn

0.0001

0.001



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last updated Thursday, December 10, 1998 12:42:51 PM.

© 1998 The Materials Research Society MRS Internet Journal of Nitride Semiconductor Research